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The Mechanism of Low pH Colloidal Silica-based Oxide Slurries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E04-07
- Print publication:
- 2010
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- Article
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The Mechanism of Haze and Defectivity Reduction in a New Generation of High Performance Silicon Final Polishing Slurries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E03-03
- Print publication:
- 2010
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- Article
- Export citation